EE-SPY801 / 802

Wafer-carrier Mounting Photomicrosensors

EE-SPY801 / 802

Photomicrosensors for detecting wafer-carrier mounting.

Please note some product models not sold in Australia may be included in the following manual(s) for our global customers.

*It is recommended to select “Save” from the right-click due to large size of manual PDF data.

*The manual which name begins with "Instruction Sheet" is a simplified manual supplied with the product.
Type All Clear	Manual Name	Catalog Number [size]	Last Update
Instruction Manual	EE-SPY801/802 Built-in Amplifier Photomicrosensor Instruction Sheet (ENG/JPN)	1610539-7B [384KB]	Jun 12, 2015 20150612	0030 031_Instruction Manual	EE-SPY801/802 Built-in Amplifier Photomicrosensor Instruction Sheet (ENG/JPN)