Wafer-carrier Mounting Photomicrosensors
             
        
last update: September 24, 2012
| Appearance | Sensing method | Sensing distance | Output configuration | Cable length | Model | 
|---|---|---|---|---|---|
|   | Reflective type | 0 to 3 mm (Infrared light) | Turns ON when wafer carrier is present. | 2 m | EE-SPY801 2M | 
|   | EE-SPY802 2M | 
| Item | Model | 
|---|---|
| Pedestal | EE9-C01 | 
| EE9-C02 | 
Note: There are no sensor functions provided.
last update: September 24, 2012