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Product Index :: Sensing Solutions :: Smart Sensors

ZS-Series Smart Sensors (2D CMOS Laser Type)


ZS-Series Smart Sensors (2D CMOS Laser Type)

 

Download Product Brochure

* Ordering information
* Specifications
* Configurations
* Dimensions, and etc

 

  can be found in our PDF brochure.
 

 

 

Standard Sensors Most Suitable for a Variety of High-precision Displacement Measurements, Including Spot Detection, Wide-range Detection, and Long-distance Detection

 

The pursuit of 2D CMOS and other advanced functions will respond to application needs through optimum technology. Our challenge to create the smallest and most lightweight compact sensor will enhance suitability to user applications. And, our commitment to user operability will aid all sensing applications.

See

 

Advanced Sensing Technology Packed Into the Smallest Sensor Heads in This Class

 

The three basics of sensing-speed, sensitivity, and precision - have been balanced to meet application needs with the best methods possible.

 

Super-high-speed Sensing at 100 µs; High resolution: 0.8, 2 or 5 µm (ZS-LD50/LD80/LD200); Stable Detection with Reduced Color and Gloss Error.

 


ZS-LD200

ZS-LD200 (Diffuse-reflective Model): Nomeclature and Measurement Range

 

 

ZS-LD50/LD80

 Stable Measurements for PCBs, Black Resin, and Metal

 

All you need to do is select the proper mode to achieve stable sensing of PCBs, resins, black rubber, and other light-penetrating workpieces (which could not be easily handled with previous reflective laser displacement meters).

 

• Just select High-precision Mode to stably measure black rubber.

• Just select Penetration Mode to stably measure PCBs or black resin.

 

Typical Examples: 1. Measuring the Shape of Black Resin Workpieces. 2. Measuring the Shape of PCB Surfaces.

 

 

Setting Software: SmartMonitor Zero Professional - Directly Measure the Surfaces of PCBs

 

 

Ideal Application Examples for Each Distance Range

 

Moving Workpieces, Measuring Tire Exteriors, Measuring Door Attachment Offsets, Measuring Car Bodies, Inspecting for Board Coplanarity, Board Height Inspection, Digital Camera Tube Lens Inspection, DVD Chassis Flatness Inspections

 

Technology: Stable measurements are achieved  by correctly recognizing the light reception distribution on the 2D CMOS.

 

 


 

ZS-LD40T

 The Only Way to Measure Glass

 

• Stably measure height and undulations in transparent, coated, or colored glass on work tables

Menu let you easily set the measurement conditions for a wide range of glass to achieve stable measurements.

 

• Stable detection at 40 mm with a line beam of 2 mm

A 2-mm line beam reduces in influence of the black and white pattern on granite work tables to achieve stable measurements.

 

• Sensing performance for measurement stability and high-speed response

Submicro resolution (0.25 µm) has been achieved for moving measurements (8 ms) of glass and mirror-surface wafers. (Actual Values)

 

Moving Measurements: Typical Examples (High-speed Mode, Response: 8 ms)

 

Regular-reflective Models: Nomeclature and measurement range

 

 

ZS-LD20T

 The Only Way to High-precision Displacement Measurements

 

Superior features for semiconductor wafer, glass, and other measurements requiring precision

An unbelievable stationary measurement precision of 0.01 µm (10 nm*), the highest in this product class.

* nm (nanometer) 10 -9 m

 

Easy sensing with an HMI that couldn't be easier to use

 

 

The SmartMonitor Zero Professional can be used to set the glass thickness and gap while monitoring the CMOS light reception image to enable accurately setting the measurement surface.

 

 

Ideal Application Examples for Each Distance Range

 

Glass Surface Measurements, Glass Undulation Measurement, Glass Height Inspection (Autofocus), HDD Surface Deflection Inspection, Measuring Wafer Warping and Thickness, Measuring Electrode Thickness on Dielectrics

 

Technology: LVDS digital processing and line beam application enable unbelievably stable measurements.

 

 

Operate

 

ZS-MDC Multi-Controllers:

Enables full applications of Controller information

 

Transfer data between multi-connected Controllers and performs high-speed multi processing.

 

High-speed Connections for Up to 9 Controllers

See the difference in applications requiring multi-point measurement, such as thickness, steps, and flatness measurements. Connect up to 9 Controllers with the fastest high-speed bus in the industry. Digital processing prevents data dropouts to provide the capability to measure exactly what is seen. (Sampling speed with 3 Controllers connected: 110 µs, Sampling speed with 9 Controllers connected: 380 µs)

 

High-speed Connections for Up to 9 Controllers

 

 

Processing Enabled by the Multi-Controller: Flatness Calculations, Reference Step Calculations, Multipoint Thickness Calculation, Average Height Calculations, Absolute Step Calculations, Twisting Calculations, Warp Calculations and User-set Calculations

 

 

Control

 

ZS-LDC Sensor Controllers:

Enables Maximum Sensing Performance with Fully Digital Processing

 

A controller the size of a business card filled with OMRON's leading-edge digital technology. Enable easily taking complete advantage of the ultimate in measurement performance.

 

Easy Sensing with an HMI That Couldn't Be Easier to Use

 

Information at the Touch of a Button

In RUN (measurement) Mode, measured values and information are displayed using 2 rows of 8-segments LEDs. The large LED display improves visibility. Measurement information includes the threshold, current, resolution, and received light amount and is available with simple key operations. LCD screens can be customized to change the display of desired information to easier-to-understand terminology.

 

Easy Sensing with an HMI

 

 

Set sensing directly.  Patent pending  

In FUN (setting) Mode, setting menus are displayed on the 2 rows of the LCD. The many display capabilities of the LCD provide easy-to-understand guidance for making settings. Function keys corresponds to displayed menu items, and measurement conditions and other settings can be made intuitively. You can also easily switch between Japanese and English displays. Communication with the operator is better than ever before.

Direct setting with function keys

 

 

Mount to DIN Track or directly to control panels.   Patent pending  

Panel Mounting Adapter (optional, sold separately)

 

 

Connect directly to a PC using USB

USB Connection

USB 2.0 and RS-232C provided as standard features.

LVDS, a new-generation high-speed communications interface, is used between the Sensor Head and Controller, an industry first. If USB is used to connect to the computer, high-speed all-digital measurement data transfer is possible.

 

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See Related Products:


ZS-CRT CompoNet Sensor Communication Unit
 

CompoNet Sensor Communication Unit

 

 

ZS-CRT

A communications gateway that connects Smart Sensors to CompoNet.

ZG2 2D Profile Measurement Sensor
 

2D Profile Measurement Sensor

 

 

ZG2

Achieving stable 2D profile measurement / door gap measurement through innovative technology.