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Part II: Safety Requirements


1. System of Standards for Machinery Safety


The International Electrotechnical Commission (IEC) prepares international standards for all electrical, electric and related technologies, and the International Organization for Standardization (ISO) prepare international standards for all technologies other than electrical and electric technologies (machinery and management). European countries often take the initiative in proposing the standards and establishing them as ISO/IEC international standards.

 

Click here to view System of Standard for Machinery Safety

 


Accelerated Globalization

  1. Europe's EN Standards are produced by CEN/CENELEC.

  2. IEC/ISO international standards are implemented without duplicating the efforts of various agreements.

  3. Member countries of the WTO/TBT Agreements shall ensure the adoption of international standards as own national standards.

IEC / ISO Standards

 


International Standards and Design of Machines and Devices

 

Responding to Machine and Device Design Standards Today

 

Responding to Machine and Device Design Standards Today

1. The newest information on international standards and industry standards must be collected, and the contents of new and revised standards must be understood.

2. The differences between EN, UL, JIS, and other standards must be understood.

3. Global designs must be created that taking into account the differences.

 

 

2. Situation by Country


(1) Europe


● EC Directives and the Machinery Directive

There are approximately 300 EC Directives issued for harmony in Europe. The EC Directives are equivalent to law in 18 countries in Europe. The EC Directive for machinery is called the Machinery Directive. The Machinery Directive (EC Directive 98/37/EC) restricts the export to Europe of machinery without the CE Marking as of January 1, 1995. The Machinery Directive requires that machinery satisfy the three pillars of safety: mechanical safety, electrical safety, and worker safety. Specifically, among other regulations, EN 292 must be satisfied for machinery, EN 60204-1 and IEC 60204-1 for electrical systems, and VBG for accident prevention.

 

The new directive (2006/42/EC) was issued June 9, 2006. It will be implemented from December 29, 2009.

 

● Low-voltage Directive (LVD)

According to the EC Directive (EC Directive 2006/95/EC), low voltage devices are devices that operate at 50 to 1,000 VAC or 75 to 1,500 VDC. The LVD applies to almost all electrical devices from electrical household appliances and office equipment to industrial electrical machinery. The LVD pertains to electrical safety in the Machinery Directive, along with the EMC Directive.

 

● EMC Directive

The EC Directive for EMC devices is called the EMC Directive (EC Directive 89/336/EEC and New EMC Directive 2004/108/EC are scheduled to be effective.). EMC stands for “electromagnetic compatibility.” When measures have been taken for both electromagnetic interference (EMI) and electromagnetic susceptibility/immunity (EMS), the device is called electromagnetically compatible, which means that EMC measures have been successfully applied.

 

Machinery directive, low-voltage directive, EMC directive

 


● CE Marking

The CE Marking is a mark of compliance with the EC Directives. The CE Marking indicates that the product complies with the stipulated level of protection in all relevant EC Directives. Devices labeled with the CE Marking may be imported and exported to Europe without restriction. You might call the CE Marking a “passport” to Europe.

 

● Relation between the EC Directives, EN Standards, and CE Marking

 

Relation between the EC Directives, EN Standards, and CE Marking

 

As explained above, all relevant EC Directives must be satisfied for a product to be labeled with the CE Marking. EN Standards complement the EC Directives. Satisfying the EN Standards alone, however, does not result in the EC Directives being satisfied. Countermeasures for product liability is mainly required in manuals and catalogs.

 

● Essential Safety Requirements

These basic requirements are listed in Machinery Directive Appendix I. The Preliminary Observations of the Annex I of Machinery Directive are introduced below.

  1. The obligations laid down by the essential health and safety requirements apply only when the corresponding hazard exists for the machinery in question when it is used under the conditions foreseen by the manufacturer. In any event, requirements 1.1.2, 1.7.3 and 1.7.4 apply to all machinery covered by this directive.

  2. The essential health and safety requirements laid down in this Directive are mandatory. However, taking into account the state of the art, it may not be possible to meet the objectives set by them. In this case, the machinery must as far as possible be designed and constructed with the purpose of approaching those objectives.

  3. The essential health and safety requirements have been grouped according to the hazards which they cover.

Machinery presents a series of hazards which maybe indicated under more than one heading in this Annex. The manufacturer is under an obligation to assess the hazards in order to identify all of those which apply to his machine; he must then design and construct it taking account of this assessment.

 

 

● European Harmonized Standards

Standards for countries in the European region are unified by CEN and CENELEC. The unified standards are called European Norm (EN) and "EN" is added to the front of the standard numbers. When new EN Standards are established, each country in the region must replace its relevant domestic standard with the EN Standard normally within six months. Applicable standards for products intended are not indicated in the EC Directives. The EN Standards that must apply are published separately in the Official Journal of the European Communities (OJEC). Manufacturers are therefore necessary to determine the design specifications based on the EN Standards published in the OJEC. In addition to official EN Standards, Drafts of European Standards (prEN), Harmonization Documents (HD), European Pre-standards (ENV), and CEN Reports (CR) are also published.

 

● Product Liability

The General Product Safety Directive and Product Liability Directive are complementary regulations but their scope is not identical. The Product Liability Directive applies to virtually all products, while the General Product Safety Directive applies only to new, used, and reconditioned products intended for or used by consumers. Both regulations, however, include areas of uncertainty. Therefore, to be especially careful, a manufacturer must compare the individual provisions of all directives that apply to its product.

 


Structure of Standards Related to Machinery Safety


Click here to view Structure of Standards Related to Machinery Safety

 

 

Main EC Directives (As of January 2008)

 

Directive No.

EC Directive Name

98/37/EC

Machinery

2006/95/EC

Low Voltage devices

2004/108/EC

Electromagnetic compatibility (EMC)

87/404/EEC

Simple pressure vessels

94/9/EC

Equipment intended for use in Potentially Explosive Atmospheres (ATEX)

97/23/EC

Pressure Equipment

89/686/EEC

Personal Protective Equipment

95/16/EC

Lifts

99/5/EC

Radio and Telecommunications Terminal Equipment (R&TTE)

2004/22/EEC

Measuring instruments

88/378/EEC

Toys

90/396/EEC

Appliances burning gaseous fuels

00/9/EC

Cableway installations designed to carry persons

89/106/EEC

Construction products

93/15/EEC

Explosive for Civil uses

90/385/EEC

Medical devices: Active implantable

93/42/EEC

Medical devices: General

98/79/EC

Medical devices: In vitro diagnostic

92/42/EEC

Hot-water boilers (efficiency requirement)

90/384/EEC

Non-automatic weighing instruments

94/62/EC

Packaging and packaging waste

94/25/EC

Recreational craft (boats)

 

Example of compliance evaluation based on machinery directive (98/31/EC)

 

Example of compliance evaluation based on machinery directive (98/31/EC)

 

● Machine requiring EC type testing by an EC accredited facility (Machines equivalent to the Machinery Directive Addendum IV A, and B)
(Machines to which the machinery directive applies are machines and safety components)

(A) Machines

 

(1) Circular saw machines for cutting wood materials and meat (Single blades/multi-blade)

(2) Hand-fed surface planing machines for woodworking

(3) Thicknessers for one-side dressing with manual loading and/or unloading for woodworking

(4) Band saw machines for cutting wood materials and meat

(5) Combined machines of the types referred to in (1) to (4) and (7)

(6) Tenoning machines

(7) Hand-fed vertical spindle molding machines for working with wood and analogous materials.

(8) Portable chainsaws

(9) Presses (Have a travel exceeding 6 mm and a speed exceeding 30 mm/s)

(10) Injection or compression plastics-molding machines

(11) Injection or compression rubber-molding machines

(12) Machines for underground working

(13) Manually-loaded trucks for the collection of household refuse incorporating a compression mechanism

(14) Transmissions

(15) Vehicles servicing lifts

(16) Devices for the lifting of persons involving a risk of falling from a vertical height of more than three meters

(17) Machines for the manufacture of pyrotechnics

 

(B) Safety components

 

(1) Electro-sensitive devices designed specifically to detect persons in order to ensure their (non-material barriers, sensor mats, electromagnetic detectors, etc.)

(2) Logic units which ensure the safety functions of bimanual controls

(3) Automatic movable screens to protect the presses referred to in (9), (10) and (11) of (A)

(4) Roll-over protection structures (ROPS)

(5) Falling-object protective structures (FOPS)

 

Note: New machinery directives are scheduled to be enacted in 2009. Therefore, there is the possibility that this flowchart will also be changed to reflect the new directives.

 

 

 

(2) The United States of America


● Occupational Safety and Health Administration (OSHA)

The Occupational Safety and Health Act (OSHA) passed in 1970 to provide safe and healthy working conditions. Part 1910 of the 29th Code of Federal Regulations (CFR) gives specific standards. Subpart O of Part 1910 sets standards for machinery and machine guarding, and divides into Part1910.211 to Part 1910.219.

 

Standard

No.Title

1910.211

Definition

1910.212

General requirements for all machines

1910.213

Woodworking machinery requirements

1910.214

Cooperage machinery

1910.215

Abrasive wheel machinery

1910.216

Mills and calendars in the rubber and plastic industries

1910.217

Mechanical power presses

1910.218

Forging machines

1910.219

Mechanical power-transmission apparatus


Part1910.212 covers general requirements for all machines. The main points in Part1910.212 are given below.

 

 

Paragraph (a)(1)

One or more methods of machine guarding shall be provided to protect the operator and other employees in the machine area from hazards such as those created by point of operation, ingoing nip points, rotating parts, flying chips, and sparks. Examples of guarding methods are barrier guards, two-hand tripping devices, electronic safety devices, etc.

Paragraph (a)(3)(ii)

The point of operation of machines whose operation exposes an employee to injury shall be guarded. The guarding device shall be in conformity with any appropriate standards, therefore, or, in the absence of applicable specific standards, shall be so designed and constructed as to prevent the operator from having any part of his body in the danger zone during the operating cycle.

 


 

● American National Standards Institute (ANSI)


ANSI is an independent standards organization in the USA. It does not create any standards by itself, but rather approves and registers US standards created in various fields. For example, in 1976 ANSI approved the Underwriters Laboratories (UL), which was established by the fire insurance industry. Manufacturers of industrial robots in Japan and many other countries worldwide use the requirements for safety of industrial robots and robotic systems given in ANSI/RIA R15.06, which forms the basis of ISO 10218. ANSI/B11.19 safety standards for machine tools were established in 2003 and have become important standards.


1. Safety of Machine Tools


The American Society of Mechanical Engineers (ASME) collaborates in creating ANSI Standards, which are often adopted as ANSI B Standards. The main safety standards for machine tools are stipulated by ANSI B11.

US Standards (B11 Standards)

 

Standard

No.Title

ANSI B11.1

Mechanical power presses

ANSI B11.2

Hydraulic power presses

ANSI B11.3

Power press brakes

ANSI B11.4

Shears

ANSI B11.5

Iron workers

ANSI B11.6

Lathes

ANSI B11.7

Cold headers and cold formers

ANSI B11.8

Drilling, milling, and boring machines

ANSI B11.9

Grinding machines

ANSI B11.10

Metal sawing machines

ANSI B11.11

Gear-cutting machines

ANSI B11.12

Roll forming and roll bending machines

ANSI B11.13

Automatic bar and chucking machines

ANSI B11.14

Coil slitting machines

ANSI B11.15

Pipe tube and shape bending machines

ANSI B11.16

Metal powder compacting presses

ANSI B11.17

Horizontal hydraulic extrusion presses

ANSI B11.18

Machinery and machine systems for processing of coiled strips, sheets, and plates

ANSI B11.19

Performance criteria for the design, construction, care, and operation of safeguarding

ANSI B11.20

Integrated manufacturing systems/cells

 

ANSI B11.19 (Safeguarding when Referenced by the Other B11 Machine Tool Safety Standards - Performance Criteria for the Design, Construction, Care, and Operation) sets standards for barrier guards often referenced by other ANSI B11 standards. The main points in B11.19 are given on the next paragraph.

 


Purposes for Using Safety Equipment


To ensure the safety of operators, safety and protective equipment is designed to prevent any hazardous machine motion or stop the machine when the operator's hand or other body part enters the hazard zone. The following items are demanded of safety and protective equipment.

1. Interlocked Protective Device

  • A protective barrier must be installed that is equipped with an interlock function that prevents the machine from operating unless the hazard is eliminated.

  • Safety related systems must be provided with a safety function that prevents the machine from starting due to a single failure.

  • Interlock equipment must be equipped with a tamper resistant function.

2. Presence-sensing Device

  • A device equipped with a function that detects the operator's hand or other body part, and outputs a signal to prevent any hazardous machine motion or to stop the machine.

  • The device must have a single failure detection function.

  • When mounted in a location that requires adjustment of the operating conditions, a blanking function must be provided.

3. Safety Mat

  • The Safety Mat is a device that detects the presence of an operator who steps on it, and prevents any hazardous machine motion.

  • The device must have a single failure detection function.

 

 

 

2. Safety of Industrial Robots


Safety items demanded of industrial robots by U.S. standards (ANSI/RIA R15.06)

Applicable scope (Section 1)

  • Robot here refers to industrial robots and industrial robot systems.

  • Date of ANSI standard implementation: The standard has been implemented for industrial robots since June 2001. The standard has been implemented for industrial robot systems since June 2002.

Robot production, modification, re-assembly (Section 4)

  • Electromagnetic compatibility (EMC) countermeasures for electrical devices

  • Safety circuit designs (according to risk reduction category)

  • Emergency stop buttons shall be shaped to fit the palm of the hand, or mushroom shaped, and shall be red on a yellow background.

  • Enabling devices, 3-position switches

Safety and protective device performance (Section 5)

  • Safety and protective devices

  • Light Curtains, Safety Mats, two-handed operating devices

Installation of robot and robot systems (Section 6)

  • Software or devices that are to be used with safety devices must be approved by an NRTL (U.S. Nationally Recognized Testing Laboratory).

Safeguarding of personnel (Sections 7, 8, 9, 10)

  • Requirements for reducing risk due to risk assessment

  • Requirements for robot risk reduction and design according to safety categories R1, R2 (A, B, C), R3 (A, B), and R4. (These risk reduction categories differ from those of the ISO13849-1 international standards.)

Safeguarding devices (Section 11)

  • Implementation methods according to Safety and protective devices (Section 5).

Maintenance of robot and robot systems (Section 12)

  • Establishing continuous safe operation programs

Testing and start-up of robot and robot systems (Section 13)

  • Testing and start-up procedures

Safety training of personnel (Section 14)

  • Training programs

Appendix (A to E)

  • B Safety distances and direct circuit-opening mechanism switches

  • C Risk assessment

OMRON safety components can be used when constructing safety-related systems conforming with the requirements of ANSI B11.19 and ANSI/RIA R15.06.



(3) Japan

 

● Industrial Safety and Health Act


The amended Industrial Safety and Health Act went into effect in 2006, with the purpose of providing an environment for the promotion of independent safety and health activities in offices. For example, the Act includes requirements to investigate dangers and hazards in the workplace and take necessary measures against them. The Act incorporates a framework to identify dangers and hazards, evaluate risks, and implement measures to reduce these risks.

 

 

● Guidelines for Comprehensive Machinery Safety Standards


In July 2007, the Ministry of Health, Labor and Welfare in Japan amended its Guidelines for Comprehensive Standards of Machinery, which was originally issued in June 2001 in response to the basic safety standards provided in ISO 12100. These Guidelines stipulate the procedure for manufacturers to use in reducing safety risks and
achieve designs that take safety into consideration in the manufacture of production equipment and machinery, and also request that users provide safety measures when they introduce and use the equipment and machinery.


In other words, the measures that ensure safety in machinery include measures that manufacturers build-in at the design stage and measures that users must take when using the machinery. However, the Guidelines also clarify the fact that the measures that manufacturers build-in at the design stage must naturally precede the measures taken by the users. The following diagram shows the flow of achieving machinery safety based on the information in the Guidelines for Comprehensive Machinery Safety Standards.

 

Safety Procedure for Machinery

 

Safety Procedure for Machinery

 

*1. In the Attachment, “risk assessment” is referred to as “assessment of hazards and dangers”.
*2. In the Attachment, “hazards” is referred to as “hazards and dangers”.

 


● JIS


The regulations and standards of individual countries must be brought in line with international standards to remove trade barriers and thus ensure free trade worldwide. To that end, Japan accepted the terms of the World Trade Organization (WTO), becoming a member and signatory to the WTO Agreement as well as the TBT Agreement (Technical Barrier Treatment). In 1995, Japan declared its commitment to a system of global cooperation. Growing pressure to adopt international standards triggered a complete overhaul of the JIS standards, which were enacted under the Industrial Standardization Law, to bring them in line with the framework of the international IEC and ISO standards. The new JIS standards will be shifted to the hierarchical system comprised of type A (basic safety standards), type B (generic safety standards) and type C (machine safety standards) standards so that Japanese standards will conform to international standards.

JIS Standards

International Standards

JIS B 9700-1 : 2004

Safety of machinery -- Basic concepts, general principles for design - Part 1: Basic terminology, methodology

ISO12100-1 : 2003

JIS B 9700-2 : 2004

Safety of machinery -- Basic concepts, general principles for design - Part 2: Technical principles

ISO12100-2 : 2003

JIS B 9702 : 2000

Safety of machinery -- Principles of risk assessment

ISO14121 : 1999

JIS B 9703 : 2000

Safety of machinery -- Emergency stop -- Principles for design

ISO13850 : 1996

JIS B 9705-1 : 2000

Safety of machinery -- Safety-related parts of control systems - Part 1: General principles for design

ISO13849-1 : 1999

JIS B 9707 : 2002

Safety of machinery -- Safety distances to prevent danger zones being reached by the upper limbs

ISO13852 : 1996

JIS B 9708 : 2002

Safety of machinery -- Safety distances to prevent danger zones being reached by the lower limbs

ISO13853 : 1998

JIS B 9709-1 : 2001

Safety of machinery -- Reduction of risks to health from hazardous substances emitted by machinery - Part 1: Principles and specifications for machinery manufacturers

ISO14123-1 : 1998

JIS B 9709-2 : 2001

Safety of machinery -- Reduction of risks to health from hazardous substances emitted by machinery - Part 2: Methodology leading to verification procedures

ISO14123-2 : 1998

JIS B 9710 : 2006

Safety of machinery -- Interlocking devices associated with guards -- Principles for design and selection

ISO14119 : 1998

JIS B 9711 : 2002

Safety of machinery -- Minimum gaps to avoid crushing of parts of the human body

ISO13854 : 1996

JIS B 9712 : 2006

Safety of machinery -- Two-hand control devices -- Functional aspects and design principles

ISO13851 : 2002

JIS B 9713-1 : 2004

Safety of machinery -- Permanent means of access to machinery - Part 1: Choice of a fixed means of access between two levels

ISO14122-1 : 2001

JIS B 9713-2 : 2004

Safety of machinery -- Permanent means of access to machinery - Part 2: Working platforms and walkways

ISO14122-2 : 2001

JIS B 9713-3 : 2004

Safety of machinery -- Permanent means of access to machinery - Part 3: Stairs, stepladders and guard-rails

ISO14122-3 : 2001

JIS B 9713-4 : 2004

Safety of machinery -- Permanent means of access to machinery - Part 4: Fixed ladders

ISO14122-4 : 2004

JIS B 9714 : 2006

Safety of machinery -- Prevention of unexpected start-up

ISO14118 : 2000

JIS B 9715 : 2006

Safety of machinery -- Positioning of protective equipment with respect the approach of parts of the human body

ISO13855 : 2002

JIS B 9716 : 2006

Safety of machinery -- Guards -- General requirements for the design and construction of fixed and movable guards

ISO14120 : 2002

JIS B 9960-1 : 1999

Safety of machinery -- Electrical equipment of machines - Part 1: General requirements

IEC60204-1 : 1997

JIS B 9704-1 : 2004

Safety of machinery -- Electro-sensitive protective equipment - Part 1: General requirements and tests

IEC61496-1 : 2004

JIS B 9704-2 : 2000

Safety of machinery -- Electro-sensitive protective equipment - Part 2: Particular requirements for equipment using active opto-electronic protective devices (AOPDs)

IEC61496-2 : 1997

JIS B 9704-3 : 2004

Safety of machinery -- Electro-sensitive protective equipment - Part 3: Particular requirements for Active
Opto-electronic Protective Devices responsive to Diffuse Reflection (AOPDDR)

IEC61496-3 : 2001

JIS B 9706-1 : 2001

Safety of machinery -- Indication, marking and actuation - Part 1: Requirements for visual, auditory and tactile signals

IEC61310-1 : 1995

JIS B 9706-2 : 2001

Safety of machinery -- Indication, marking and actuation - Part 2: Requirements for marking

IEC61310-2 : 1995

JIS B 9706-3 : 2001

Safety of machinery -- Indication, marking and actuation - Part 3: Requirements for the location and operation of actuators

IEC61310-3 : 1999

JIS C 0508-1 : 1999

Functional safety of electrical/electronic/ programmable electronic safety-related systems - Part 1: General requirements

IEC61508-1 : 1998

JIS C 0508-2 : 2000

Functional safety of electrical/electronic/ programmable electronic safety-related systems - Part 2: Requirements for electrical/electronic/programmable electronic safety-related systems

IEC61508-2 : 2000

JIS C 0508-3 : 2000

Functional safety of electrical/electronic/ programmable electronic safety-related systems - Part 3: Software requirements

IEC61508-3 : 1998

JIS C 0508-4 : 1999

Functional safety of electrical/electronic/ programmable electronic safety-related systems - Part 4: Definitions and abbreviations

IEC61508-4 : 1998

JIS C 0508-5 : 1999

Functional safety of electrical/electronic/ programmable electronic safety-related systems - Part 5: Examples of methods for the determination of safety integrity levels

IEC61508-5 : 1998

JIS C 0508-6 : 2000

Functional safety of electrical/electronic/ programmable electronic safety-related systems - Part 6: Guidelines on the application of parts 2 and 3

IEC61508-6 : 2000

JIS C 0508-7 : 2000

Functional safety of electrical/electronic/ programmable electronic safety-related systems - Part 7: Overview of techniques and measures

IEC61508-7 : 2000

(As of August 2008)

 

 

(4) China


● GB


Chinese national standards (GB: Guojia Biaozhun)

Standards for electrical equipment are produced based on IEC standards.


Structure of National Standards

 

 

Standard

Administrator

GB

Mandatory National Standards

Standardization Administration of the People's Republic of China

GB/T

Voluntary National Standards

Standardization Administration of the People's Republic of China

 

Electric wires and cables
Electric circuit switches, electronic equipment for protection or connection use

 

GB

International Standards

GB14048.5-1993

IEC60947-5-1-1990

GB/T14048.10-1999

IEC60947-5-2-1992

GB/T14048.10-1999

IEC60947-3-1990

GB14048.2-1994

IEC60947-2-1989

GB14048.4-4993

IEC60947-4-1-1990

 

Low-voltage electrical equipment

 

GB

IEC Standards Number

GB14048.5-1993

IEC60947-5-1-1990

GB14048.6-1998

IEC60947-4-2-1995

・・・etc.

 


● CCC


CCC: China Compulsory Certification mark system

 

CCC: China Compulsory Certification mark system


Upon its entry into the World Trade Organization (WTO) in 2001, China integrated its former Certification System for Imported Items and Certification System for Items Distributed within China, and issued the New Compulsory Certification System on December 3, 2001, which took effect on May 1, 2002.


On August 1, 2003 it became prohibited to import or sell products that were not certified under the new certification system. The first list of products to be subject to the New Compulsory Certification System consisted of 132 products in 19 groups.

 

These products were required to display the China Compulsory Certification (CCC) mark.

 


(5) South Korea


● KS


South Korea became a WTO member and signatory to the TBT Agreement (Technical Barrier Treatment) in 1995, the year the WTO was created, and declared its commitment to a system of global cooperation. As a result, the Korean Industrial standards (KS) were established by the Industrial Standardization Law as part of an overall obligation to employ international standards, and are in line with the framework of the international IEC and ISO standards.


● S-mark


The S-mark is a voluntary certification system established in November 1997 by the Korea Occupational Safety and Health Agency (KOSHA) to reduce the occurrence of work-related accidents. The S-mark is granted for products that have been examined by KOSHA and are deemed to satisfy standards based on the Industrial Safety Maintenance Law, Article 34, item 2, for product safety, product reliability, and the quality control capabilities of the manufacturer.


In the case of OMRON, “Safety Components” have been certified for both safety and EMC, and basic sensors have received EMC certification. For details of certified models refer to the Safety Components Series Catalog (Y106).

 


(6) Australia


● Australian Standards numbers


Machine standards are created based on ISO standards, and electrical standards are created based on IEC standards.

 


(7) International Standards Relationships

 

Country

Japan

Europe

U.S.A.

Canada

China

South Korea

Australia

Item

TBT Agreement
(WTO signatory)

International standards

National standards

ISO

12100-1

JISB9700-1

EN ISO12100-1

ANSI/ISO 12100-1

---

GB/T15706.1-1995*1

KSBISO12100-1

AS4024.1201

12100-2

JISB9700-2

EN ISO12100-2

ANSI/ISO 12100-2

---

GB/T15706.2-1995*1

KSBISO12100-2

AS4024.1202

14121

JISB9702

EN ISO 14121

---

---

GB/T16856-1997

KSBISO14121

AS4024.1301

13849-1

JISB9705-1

EN ISO 13894-1

---

---

GB/T16855.1-1997

KSBISO13849-1

AS4024.1501

13850

JISB9703

EN 418

---

---

GB16754-1997

KSBISO13850

AS4024.1604

13852

JISB9707

EN 294

---

---

GB12265.1-1997

KSBISO13852

AS4024.1801

13853

JISB9708

EN 811

---

---

GB12265.2-2000

KSBISO13853

AS4024.1802

13854

JISB9711

EN 349

---

---

GB12265.3-1997

KSBISO13854

AS4024.1803

13855

JISB9715

EN 999

---

---

---

KSBISO13855

AS4024.2

IEC

60204-1

JISB9960-1

EN 60204-1

---

---

GB5226.1-2002

KSCIEC60204-1

AS60204.1

61496-1

JISB9704-1

EN 61496-1

UL61496-1

CSA-E61496-1

GB/T19436.1-2004

KSCIEC61496-1

AS4024.2

61310-1

JISB9706-1

EN 61310-1

---

---

GB18209.1-2000

KSCIEC61310-1

AS4024.1904

61310-2

JISB9706-2

EN 61310-2

---

---

GB18209.2-2000

KSCIEC61310-2

AS4024.1906

61310-3

JISB9706-3

EN 61310-3

---

---

GB18209.3-2002

KSCIEC61310-3

AS4024.1907

Certification mark

---

CE-Mark*2

UL*3

CSA*3

CCC*4

S-Mark*5

---

 

*1. ISO/TR 12100-1: 1992, ISO/TR 12100-2

*2. Self-declaration is allowed for general machines in the Machinery Directive.

*3. UL and CSA are mutual certification systems.

*4. As of April 2006. Certification is not required for the field of industrial machinery.

 

*5. S-mark certification requires Labor Department approval of safety certification regulations in addition to standards compliance.

 

 

(8) Industry Standards

 

● Semiconductor Manufacturing Equipment Guideline SEMI Standards

 

SEMI, which is an abbreviation of Semiconductor Equipment and Materials International, was established in 1970 as an international industry association for semiconductor manufacturing equipment and materials manufacturers. SEMI standards have been established as independent industry standards. There are separate standards for materials (M Series), Facilities (F Series), Flat Panel Displays (D Series), and Traceability (T Series), and the S Series governs environment, health and safety (EHS). These standards have been employed by many equipment users, primarily in the United States. Their headquarters are in California, and there are 11 offices in 8 countries around the world, including in Tokyo.

 

Structure of SEMI S Series

 

Item

Content

SEMI S1

Safety guidelines for equipment safety labels

SEMI S2

Environmental, health and safety guideline for semiconductor manufacturing equipment

SEMI S3

Safety guidelines for process liquid heating system

SEMI S4

Safety guideline for the separation of chemical cylinders contained in dispensing cabinets

SEMI S5

Safety guideline for flow limiting devices

SEMI S6

Environmental, safety and health guideline for exhaust ventilation of semiconductor manufacturing equipment

SEMI S7

Safety guidelines for environmental, safety and health (ESH) evaluation of semiconductor manufacturing equipment

SEMI S8

Safety guidelines for ergonomics engineering of semiconductor manufacturing equipment

SEMI S9

Guide to electrical design verification tests for semiconductor manufacturing equipment that have been moved to SEMI S22

SEMI S10

Safety Guideline for risk assessment and risk evaluation process

SEMI S11

Environmental, health and safety guidelines in relation to semiconductor manufacturing equipment mini environments

SEMI S12

Guidelines for equipment decontamination

SEMI S13

Safety guidelines for operation and maintenance manuals for semiconductor manufacturing equipment

SEMI S14

Safety guidelines for fire risk assessment and mitigation for semiconductor manufacturing equipment

SEMI S15

Safety guideline for the evaluation of toxic and flammable gas detection systems

SEMI S16

Guide for semiconductor manufacturing equipment design for reduction of environmental impact at end of life

SEMI S17

Safety guideline for unmanned transport vehicle (UTV) systems

SEMI S18

Environmental, health and safety guideline for silane family gases handling

SEMI S19

Safety guideline for training of semiconductor manufacturing equipment installation, maintenance and service personnel

SEMI S20

Safety guideline for identification and documentation of energy isolation devices for hazardous energy control

SEMI S21

Safety guideline for worker protection

SEMI S22

Safety guideline for the electrical design of semiconductor manufacturing equipment

SEMI S23

Guide for conservation of energy, utilities and materials used by semiconductor manufacturing equipment

SEMI S24

Safety guideline for multi-employer work areas

SEMI S25

Safety guideline for hydrogen peroxide storage and handling systems

SEMI S26

Environmental, health and safety guideline for FPD manufacturing system

(As of August 2008)
 

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