In-plane Uniform Control to Improve Yield | Australia

Case Studies :: Semiconductor Industry Solutions :: Power Supply

Omron's Unique Idea "Gradient Temperature Control Algorithm" Realizes In-plane Uniform Control to Improve Yield
Omron's Product:	• EJ1G Modular Temperature Controller
Gradient temperature control algorithm enhances FPD and wafer quality with improved surface uniformity. Simple programless communication enables connection to PLC without special programs. Small modular construction with multiple inputs and a detachable terminal block reduces design and assembly times.

• Effects of Gradient Temperature Control

• Greater Quality with Uniform In-plain Temperature Control

Both uniform in-plain control and user-set temperature distribution are possible.

Traditional temperature control: Inconsistent temperature distribution with deviations in thermal processing; Gradient temperature control: Uniform temperature distribution.

Effective thermal processing range and high quality achieved for entire area.

• Conceptual Image

Ladder-less connection with PLC

• Application Example

Gradient temperature control supports uniform multi-stage furnace control!

Uniform surface control in a multi-level furnace.

Omron's Unique Idea "Gradient Temperature Control Algorithm" Realizes In-plane Uniform Control to Improve Yield