Wafer Heating Uniformity using Gradient Temperature Control | Australia | Omron IA

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Semiconductor Industry Solutions using Omron Sensing & Control


	Displacement Measurement through a View Port
	High-Precision Positioning
	Process Data Collection
	Semiconductor Manufacturing Process
	Faster System Start-up
	High Speed Analog Process Control
	Uniform Wafer Heating
	In-plane Uniform Control
	Multi-point Uniform Temperature Control
	Harmonizing Flexibility, Speed, and Advanced Motion Control Operations
	Accelerate Global Operation by Multi-vendor Field Network System
	Space, Wiring and Setting Saving Controller

Case Studies :: Semiconductor Industry Solutions :: Power Supply

Omron’s Gradient Temperature Control Algorithm Provides Wafer Heating Uniformity, Improving Overall Yield
Omron's Product:	• EJ1 Modular Temperature Controller
Improve product quality by optimizing wafer/FPD surface temperature uniformity using gradient temperature control algorithm. Easy connection as no program is needed for both PLC and HMI. It improves assembly efficiency with small-module structure that comes with multiple input channels and removable terminal block.

Gradient Temperature Control Configuration Diagram