Case Studies :: Semiconductor Industry Solutions :: Power Supply

SYSMAC SPU Enables Capturing of Machine Characteristics to Allow for Faster System Start-up

Omron's Product:

• CJ1W-SPU01 Storage and Processing Unit

• WS02-EDMC1 Data Management Software

An SPU enables high-speed collection of data with time stamp without affecting the process control.
The collected data can be updated into computer automatically.
It can not only monitor the accumulated process data but also enable root cause analysis and operational tendency understanding.

Advantages of Data Collection for Equipment and Facilities

Reduce development and startup time; Improve operating rates by minimizing differences between machines; Minimize downtime.

Features of a System Using the SYSMAC SPU

• Data or bit signals can be read from devices (e.g., MFC or RF power supplies) in equipment via DeviceNet or using a PLC Unit to reliably collect data at high speed with a SYSMAC SPU. Making the required settings is simple.

• Data format can be created freely for the collection data taking into account the link with the host.

• The collected data is transferred to the host for each wafer process and each lot.

System Configuration Diagram