Case Studies ::
SYSMAC SPU Enables
Capturing of Machine Characteristics to Allow for Faster
Storage and Processing Unit
Data Management Software
An SPU enables high-speed collection of data with time
stamp without affecting the process control.
The collected data can be updated into computer
It can not only monitor the accumulated process data but
also enable root cause analysis and operational tendency
Data Collection for Equipment and Facilities
Features of a
System Using the SYSMAC SPU
Data or bit signals can be read
from devices (e.g., MFC or RF power supplies) in equipment via
DeviceNet or using a PLC Unit to reliably collect data at high
speed with a SYSMAC SPU. Making the required settings is
• Data format can be created
freely for the collection data taking into account the link
with the host.
• The collected data is
transferred to the host for each wafer process and each lot.