High-Precision Displacement Measurement through a View Port | Australia | Omron IA

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OMRON IA Global

Semiconductor Industry Solutions using Omron Sensing & Control


	Displacement Measurement through a View Port
	High-Precision Positioning
	Process Data Collection
	Semiconductor Manufacturing Process
	Faster System Start-up
	High Speed Analog Process Control
	Uniform Wafer Heating
	In-plane Uniform Control
	Multi-point Uniform Temperature Control
	Harmonizing Flexibility, Speed, and Advanced Motion Control Operations
	Accelerate Global Operation by Multi-vendor Field Network System
	Space, Wiring and Setting Saving Controller

Case Studies :: Semiconductor Industry Solutions :: Power Supply

High-Precision Displacement Measurement through a View Port

Omron's Product:

• ZS Series Smart Sensor (2D CMOS Laser Type)

• F210-C10-ETN Network Vision Sensor

The wafer height inside the chamber can measured precisely through a view port using Laser Displacement sensor.
Measurement information of vision sensor with real-time animated images can be monitored remotely via Ethernet.

Detecting the orientation of wafer; Detecting the position gap of wafer's height