High-Precision Displacement Measurement through a View Port

Australia



	Implementation of Safety Solution in Control System
	Omron Provides Total Safety Solution

	Redundancy System in Utility Equipment
	No.1 Line Up Liquid Leakage Detection Sensor to Solve Your Application
	A New Handy Reader Capable of Reading Directly Marked Codes

	CIDRW Improves Wafer Carrier/Reticle Management
	Effective Wafer Level Management for Small Lot Production

	High-Precision Displacement Measurement through a View Port
	High-Precision Positioning that is Not Influenced by Temperature or View Port Degradation
	Open Network Controller Enables Collection of Process Data
	Improvement on Efficiency of Semiconductor Manufacturing Process
	SYSMAC SPU Allows for Faster System Start-up
	Loop Controller Allows High Speed and High Accuracy Analog Process Control
	Omron's Gradient Temperature Control Algorithm Provides Wafer Heating Uniformity
	In-plane Uniform Control to Improve Yield
	Multi-point Uniform Temperature Control by GTC Algorithm
	Harmonizing Flexibility, Speed, and Advanced Motion Control Operations
	Accelerate Global Operation by High-speed and Multi-vendor Field Network System
	Space, Wiring and Setting Saving Controller with High Reliability

	Stable Detection of Glass Substrate
	High Precision and Stability at Nano-meter Level
	Ideal for Large-size LCD Panel Stick-out Detection
	High Precision and Stable Alignment of Images

	Power Supply with Improved Reliability!
	S8M Provides Safety on the Secondary DC Circuit
	S8VM Offers New Undervoltage Alarm Function

Omron's Product:

• ZS Series Smart Sensor (2D CMOS Laser Type)

• F210-C10-ETN Network Vision Sensor

The wafer height inside the chamber can measured precisely through a view port using Laser Displacement sensor.
Measurement information of vision sensor with real-time animated images can be monitored remotely via Ethernet.

Detecting the orientation of wafer; Detecting the position gap of wafer's height